1.Maintenance pump: In vacuum system, the air volume is very small, and the front pump can not be used effectively. For this purpose, a small auxiliary pump is equipped to maintain the main pump, which is called the maintenance pump. If a small rotary vane pump is installed at the outlet of the diffusion pump, it is the maintenance pump.China PVD Coating Machine Suppliers
2.vacuum coating：A method of preparing a film on a substrate in vacuum.
4.testing substrate：Substrate used for measurement and/or test at the beginning, during or after coating.
5.coating material：Raw materials used to make film.
6.sputtering material：Coating material used for sputtering in vacuum sputtering.
7.film material：Materials that make up the film.
8.sputtering rate：In a given time interval, the amount of material sputtered is divided by the time interval.
9.deposition rate：In a given time interval, the amount of material deposited on the substrate is divided by the time interval and the surface area of the substrate.
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