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How to maintain the vacuum coating machine?

Update:02-04-2021
Summary:1. The working room should be cleaned every time the vacuum electroplating machine completes more th...

1. The working room should be cleaned every time the vacuum electroplating machine completes more than 200 coating procedures.
Method: Repeatedly scrub the inside of the vacuum chamber Vacuum coating machinewith a saturated solution of sodium hydroxide (NaOH), (note that the human skin should not directly touch the solution of caustic soda to avoid burns) The purpose is to make the coated aluminum (AL) react with NaOH. After the reaction, the film Fall off and release hydrogen. Then clean the vacuum chamber with clean water and clean the dirt in the fine suction valve with a cloth dipped in gasoline.
2. When the rough pump (slide valve pump, rotary vane pump) works continuously for one month (half in the rainy season), new oil should be replaced.
Method: Unscrew the oil bolt, drain the old oil, and then start the pump for a few seconds to completely drain the old oil in the pump. Screw back the oil
Bolt, add new oil to the rated amount (observed by oil sight glass). If you use it continuously for more than half a year, you should open the oil cap when changing the oil and wipe the dirt in the tank with a cloth.
3. The diffusion pump has been used continuously for more than 6 months, the pumping speed is obviously slow, or the operation is improper, fill into the atmosphere, remove the connecting water pipe, remove the electric stove plate, unscrew the first-stage nozzle, and first use gasoline to connect the pump cavity and pump Clean the tank again, then wash it with washing powder and water, and then rinse thoroughly with water. After the water evaporates, install the pump tank, add new diffusion pump oil, and install it back to the body, connect the water pipe, and install the electric stove. Disk, you can reboot. Before restarting, pay attention to leak detection work.
Method: Start the maintenance pump and close the door. After a few minutes, observe whether the vacuum degree of the diffusion pump reaches 6X10 Pa. Otherwise, leak detection is required. Check whether the joint is equipped with a sealing rubber ring, or the sealing ring is crushed. Heat up after removing the hidden danger of air leakage, otherwise the diffusion pump oil will burn the ring and cannot enter the working state.

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