What are the main components of a vacuum coating system?

1. Vacuum chamber

　　 coating equipment mainly has two forms: continuous coating production line and single-chamber coating machine, stainless steel material manufacturing, argon arc welding, surface chemical polishing treatment, and various specifications of flange interfaces are welded on the vacuum chamber components.

　　2, vacuum acquisition part

　　In vacuum technology, the vacuum acquisition part is an important part. The acquisition of vacuum cannot be achieved by a single vacuum equipment and method. Several pumps must be used in combination, such as mechanical pumps, Roots pumps, molecular pump systems, etc.

　　3, vacuum measurement part

　　 The vacuum measurement part of the vacuum system is to measure the pressure in the vacuum chamber. Like a vacuum pump, no vacuum gauge can measure the entire vacuum range, so people have made many types of vacuum gauges according to different principles and requirements. Such as thermocouple meter, ionization meter, Pirani meter, etc.

　　 4. Power supply part

　　The target power supply mainly includes DC power supply, intermediate frequency power supply, pulse power supply, and radio frequency power supply (RF). Common power supply manufacturers include AE, ADL, Hottinger, etc.

　　 5. Process gas input system

Process gases, such as argon (Ar), krypton (Kr), nitrogen (N2), acetylene (C2H2), methane (CH4), hydrogen (H2), oxygen (O2), etc., are generally supplied by gas cylinders. Gas pressure reducing valve, gas stop valve, pipeline, gas flow meter, solenoid valve, piezoelectric valve, and then into the vacuum chamber. The advantage of this gas input system is that the pipeline is simple and clear, and it is easy to repair or replace the gas cylinder. The coating machines do not affect each other. There are also cases where multiple coating machines share a set of gas cylinders. This situation may be seen in some large-scale coating workshops. Its advantage is that it reduces the occupancy of gas cylinders, unified planning and unified layout. The disadvantage is that due to the increase in the number of joints, the chance of air leakage increases. Moreover, the coating machines will interfere with each other, and the pipeline of one coating machine may leak air, which may affect the product quality of other coating machines. In addition, when replacing gas cylinders, it is necessary to ensure that all machines are in a non-gas state.

　　 6. Mechanical transmission part

　　The coating requires that the thickness of the periphery must be uniform. Therefore, there must be three rotations in the coating process to meet the requirements. That is, while the large workpiece table is required to rotate (I), the small workpiece carrier also rotates (II), and the workpiece itself can rotate at the same time (III). In mechanical design, there is generally a large driving gear in the center of the bottom of the large workpiece turntable, and some small star wheels mesh with it. If the product is to be rotated, the workpiece is generally rotated by a shift fork.

　　7, heating and temperature measurement part

　　 Coating equipment generally has heaters in different positions, and thermocouples are used to measure and control the temperature. However, because the thermocouple clamping position is different from the workpiece position, the temperature reading cannot be the true temperature of the workpiece. To measure the true temperature of the workpiece, there are many methods, you can install high temperature test paper or thermocouple meter on the workpiece.

　　 8. Ion evaporation and sputtering source

The evaporation source of 　　 multi-arc plating is generally in the shape of a round cake, commonly known as a round cake target, and there are also rectangular multi-arc targets. A magnet is installed in the target base. By moving the magnet back and forth, the intensity of the magnetic field is changed, and the moving speed and trajectory of the arc spot can be adjusted. In order to reduce the temperature of the target and the target base, the target base must be continuously supplied with cooling water. In order to ensure high electrical and thermal conductivity between the target and the target base, a tin gasket can also be added between the target and the target base. Magnetron sputtering coating generally uses rectangular or cylindrical sputtering cathodes.

　　9, water cooling system

　　 generally consists of cold water tower, ice water machine, water pump, etc.

　　10, industrial control system