What are the normal working conditions and maintenance methods of vacuum coating equipment？

1. Ambient temperature: 10~30℃

2. Relative humidity: not more than 70%

3. Cooling water inlet temperature: not higher than 25℃

4. Cooling water quality: urban tap water or water of equivalent quality

5. Power supply voltage: 380V, three-phase 50Hz or 220V, single-phase 50Hz (depending on the needs of the electrical appliances used), the voltage fluctuation range is 342~399V or 198V~231V, and the frequency fluctuation range is 49~51Hz;

6. The pressure, temperature and consumption of compressed air, liquid nitrogen, hot and cold water, etc. required by the equipment should be stated in the product instruction manual.

7. The surrounding environment of the equipment is clean and the air is clean, and there should be no dust or gas that can cause the surface of electrical appliances and other metal parts to corrode or cause conduction between metals.

In addition, the laboratory or workshop where the vacuum coating equipment is located should be kept clean and hygienic. The floor is terrazzo or wood painted floor, no dust. In order to prevent the gas discharged from the mechanical pump from polluting the laboratory environment, the method of installing an exhaust pipe (metal or rubber pipe) above the exhaust port of the pump can be used to discharge the gas outdoors.

After the vacuum coating equipment completes more than 200 coating procedures, the studio should be cleaned once.

Method: repeatedly scrub the inner wall of the vacuum chamber with caustic soda (NaOH) saturated solution (note that the human skin cannot directly contact the caustic soda solution to avoid burns) The purpose is to make the plated film aluminum (AL) react with NaOH, and the film layer after the reaction fall off and release hydrogen gas. Then clean the vacuum chamber with clean water and clean the dirt inside the fine extraction valve with a cloth dipped in gasoline.

When the roughing pump (slide valve pump, rotary vane pump) works continuously for one month (half of the rainy season), it needs to be replaced with new oil.

Method: Unscrew the oil bolt, drain the old oil, and then start the pump for a few seconds to completely discharge the old oil in the pump. Unscrew the oil-returning bolt and add new oil to the rated amount (observed by the oil sight glass). For more than half a year of continuous use, the oil cover should be opened when changing the oil, and the dirt in the box should be wiped off with a cloth.

Before restarting, pay attention to leak detection.

If the diffusion pump has been used continuously for more than 6 months, the pumping speed is obviously slowed down, or the operation is improper. Fill the air into the atmosphere, remove the connecting water pipe, remove the electric stove, unscrew the first-level nozzle, and clean the pump cavity and the pump bladder with gasoline first. Once again, wash it with washing powder mixed with water, and then wash it thoroughly with clean water. After the water has evaporated and dried, install the pump bladder, add new diffusion pump oil, and put it back into the body, connect the water pipe, and install the electric hob. to restart. Before restarting, pay attention to leak detection.

Method: Start the maintenance pump, close the door, and after a few minutes, observe whether the vacuum degree of the diffusion pump reaches 6X10 Pa, otherwise, perform leak detection. Check whether the sealing ring is installed at the joint, or the sealing ring is crushed. Heating can only be done after eliminating the hidden danger of air leakage, otherwise the diffusion pump oil will burn the ring, and the vacuum coating equipment will not be able to enter the working state.