Features:
• Superior performance
• Broad power and frequency range
• Fast arc management system
• Advanced arc management technology, low arc residual energy
• Flexible & Modular design structure
• High output current
• Leading power technology
Customer benefit:
• Adjustable to various processes and applications
• Thin film deposition, and film uniformity
• High deposition speed in technological conditions
• Convenient system integration
• Wide range of power regulation
• High reliability